Title:
マイクロ機械加工されたマイクロフォンおよびマルチセンサ、ならびにそれらを生産する方法
Document Type and Number:
Japanese Patent JP4812139
Kind Code:
B2
Abstract:
A microphone includes a diaphragm assembly supported by a substrate. The diaphragm assembly includes at least one carrier, a diaphragm, and at least one spring coupling the diaphragm to the at least one carrier such that the diaphragm is spaced from the at least one carrier. An insulator (or separate insulators) between the substrate and the at least one carrier electrically isolates the diaphragm and the substrate.
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Inventors:
Martin, John Earl.
Bros Nihan, Timothy Jay.
Core, craig
Thomas Nunan
Weigold, Jason
Chang, Shin
Bros Nihan, Timothy Jay.
Core, craig
Thomas Nunan
Weigold, Jason
Chang, Shin
Application Number:
JP2008508951A
Publication Date:
November 09, 2011
Filing Date:
April 21, 2006
Export Citation:
Assignee:
Analog Devices, Inc.
International Classes:
H04R31/00; B81B3/00; B81C1/00; H04R19/04
Domestic Patent References:
| JP2000022172A | 2000-01-21 | |||
| JP2000121473A | 2000-04-28 | |||
| JPH077161A | 1995-01-10 | |||
| JP2005020411A | 2005-01-20 | |||
| JP2000164890A | 2000-06-16 | |||
| JPH1062177A | 1998-03-06 | |||
| JP2004145032A | 2004-05-20 | |||
| JP2001231099A | 2001-08-24 | |||
| JPS5363880A | 1978-06-07 | |||
| JPH06163941A | 1994-06-10 | |||
| JP2004537182A | 2004-12-09 | |||
| JPH1194506A | 1999-04-09 | |||
| JP2001508940A | 2001-07-03 | |||
| JP2005039652A | 2005-02-10 | |||
| JP2003130702A | 2003-05-08 |
Attorney, Agent or Firm:
Hidesaku Yamamoto
Takaaki Yasumura
Natsuki Morishita
Takaaki Yasumura
Natsuki Morishita