Title:
マイクロマシニング型の構成素子および方法
Document Type and Number:
Japanese Patent JP2006500233
Kind Code:
A
Abstract:
A micromechanical component and a method for producing a micromechanical component are proposed, a hollow space and a region of porous silicon being provided, the region of porous silicon being provided for lowering the pressure prevailing in the hollow space.
Inventors:
Gerhard Ramel
Gimon alum bulster
Frank shafer
Hubert Benzel
Gimon alum bulster
Frank shafer
Hubert Benzel
Application Number:
JP2004538669A
Publication Date:
January 05, 2006
Filing Date:
March 06, 2003
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
B81B3/00; B81B7/00; B81C3/00
Domestic Patent References:
| JP2001068780A | 2001-03-16 |
Foreign References:
| US5882496A | 1999-03-16 | |||
| WO2002012906A1 | 2002-02-14 | |||
| WO1996039632A1 | 1996-12-12 | |||
| WO2002038492A1 | 2002-05-16 |
Attorney, Agent or Firm:
Toshio Yano
Einzel Felix-Reinhard
Reinhard Einsel
Einzel Felix-Reinhard
Reinhard Einsel