Title:
マイクロマシニング型の回転角加速度センサ
Document Type and Number:
Japanese Patent JP4705229
Kind Code:
B2
Abstract:
A micromechanical angular-acceleration sensor having a substrate, which has an anchoring device provided on the substrate. The sensor has a ring-shaped inertial mass joined to the anchoring device by a torsion-spring device such that the anchoring device is essentially located in the center of the ring. The ring-shaped inertial mass can then be elastically displaced from its resting position, about at least one rotational axis, by the angular acceleration to be detected. The sensor has a displaceable, first capacitor-plate device attached to the ring-shaped inertial mass, and a stationary, second capacitor-plate device attached to the substrate. The first and the second capacitor-plate devices are designed as a differential-capacitor device for detecting one of the parameters indicating the angular acceleration about the rotational axis.
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Inventors:
Martin Chef Thaler
Halalto emmerich
Halalto emmerich
Application Number:
JP2000245968A
Publication Date:
June 22, 2011
Filing Date:
August 14, 2000
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
G01P3/22; G01P15/00; B81B3/00; G01P9/04; G01P15/08; G01P15/125; H01L29/84
Domestic Patent References:
| JP6018551A | ||||
| JP10047972A | ||||
| JP8304450A | ||||
| JP5248875A | ||||
| JP10160483A |
Foreign References:
| US5914553 | ||||
| WO1998015799A1 |
Attorney, Agent or Firm:
Toshio Yano
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel
Takuya Kuno
Einzel Felix-Reinhard
Reinhard Einsel