Title:
マイクロメカニックな構成エレメント
Document Type and Number:
Japanese Patent JP4499199
Kind Code:
B2
Abstract:
A micromechanical component includes a one-piece surface structure that is created on a substrate. The one-piece surface structure is attached to the surface of the substrate by at least two anchoring areas. The anchoring areas are a small distance apart, which is comparatively small in comparison with the lateral dimension of the surface structure. The surface structure has movable electrodes. Opposite them there are rigid electrodes that are attached to the substrate by additional anchoring areas. The additional anchoring areas also have a small distance between one another and to the anchoring areas.
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Inventors:
Peter Sulzberger
Michael Offenberg
Michael Offenberg
Application Number:
JP25986097A
Publication Date:
July 07, 2010
Filing Date:
September 25, 1997
Export Citation:
Assignee:
ROBERT BOSCH GMBH
International Classes:
G01L1/14; G01P15/125; B81B3/00; B81B7/00; B81C1/00; G01P15/08
Domestic Patent References:
| JP8219795A |
Foreign References:
| US5025346 |
Attorney, Agent or Firm:
Toshio Yano
Hiroshi Sugimoto
Hiroyasu Ninomiya
Einzel Felix-Reinhard
Hiroshi Sugimoto
Hiroyasu Ninomiya
Einzel Felix-Reinhard