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Title:
マイクロメカニック構成要素
Document Type and Number:
Japanese Patent JP5068969
Kind Code:
B2
Abstract:
A micromechanical component has a structure such that a material flow is guided from at least one preferred direction for the purpose of uniformly enveloping the micromechanical component.

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Inventors:
Frank Reichenbach
Frieder Hark
Arund Kerberer
Application Number:
JP2006221609A
Publication Date:
November 07, 2012
Filing Date:
August 15, 2006
Export Citation:
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Assignee:
ROBERT BOSCH GMBH
International Classes:
B81C99/00; H01L23/08; B81B7/00; H01L21/56; H01L23/12
Domestic Patent References:
JP10107170A
JP2004193372A
JP10170380A
JP9307026A
JP1145133U
Attorney, Agent or Firm:
Toshio Yano
Einzel Felix-Reinhard



 
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