To provide a micromechanical device having a piezo-electric drive actuator which does not use a lead system material for a piezo-electric film, is easy to manufacture and can eliminate sticking even if it happens.
The micromechanical device includes an actuator 10 which is installed on a substrate 1 and has a piezo-electric film 4, a lower electrode 3 provided on a face opposed to the substrate 1 of the piezo-electric film 4, and an upper electrode 5 provided on an opposed face to the face on which the lower electrode 3 of the piezo-electric film 4 is provided, and has a fixing part 10a fixed on the substrate 1 and an action part 10b extending from the fixing part 10a, a voltage applying means 13 to apply voltage between the lower electrode 3 and the upper electrode 5, and a polarity switching means 14 to switch over polarity of the voltage applied.
NAGANO TOSHIHIKO
NISHIGAKI MICHIHIKO
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