To provide a micromechanical pipette device which can pipette a bit of liquid with a high degree of accuracy so as to eliminate problems inherent to a well-known prior art device.
A micromechanical structure of a pipette module is integrally formed on a silicon wafer 14. A first chamber 15 is formed in the pipette module, having a membrane 16 which serves as a part of a wall of the chamber 15 and which displaces so as to change the internal volume of the chamber 15. The pipette module is also formed therein with a passage 18, and accordingly, a fluid connection with no valve is directly established between the first chamber 15 and an inlet/outlet 12 of the pipette module. An operating device 19 for displacing the membrane is provided, and accordingly, a certain quantity of air or liquid is introduced into and discharged from the first chamber by displacing the membrane driven by the device 19. Further, a certain quantity of liquid sample is sucked into or discharged from a pipette chip 13.
| JP4993095 | Lubrication device in dispenser |
SZITA NICOLAS
BAADER FELIX
BURGER JUERGEN
ELSENHANS OLIVIER
