Title:
MICROMIRROR DEVICE AND OPTICAL IRRADIATION APPARATUS
Document Type and Number:
Japanese Patent JP2010014798
Kind Code:
A
Abstract:
To provide a micromirror device in which the change in temperature is small and a stable operation is available, and to provide an optical irradiation apparatus.
The micromirror device 10 includes: a micromirror 21; a light-transmissive window member 23 arranged to cover the micromirror; an air-cooling means 11 which flows air in a space S between the micromirror and the light-transmissive window member; and cooling means 12, 13 provided on the back face side of a substrate on which the micromirror is arranged.
Inventors:
OGUCHI HISAAKI
Application Number:
JP2008172448A
Publication Date:
January 21, 2010
Filing Date:
July 01, 2008
Export Citation:
Assignee:
NSK LTD
International Classes:
G02B26/08; G03F7/20; H01L21/027
Attorney, Agent or Firm:
Keijiro Tamura
Kenichi Kobayashi
Kenichi Kobayashi