Title:
密封されたキャビティおよびプラグを備えるマイクロ部品及びそのようなマイクロ部品の製造方法
Document Type and Number:
Japanese Patent JP5095218
Kind Code:
B2
Abstract:
The micro-component has a hermetic micro-cavity (6) delimited by a cover (4) with an opening (5). A sealing layer (9) delimiting the micro-cavity is formed on the cover. A stopper (8) enclosing the opening and a part of the cover in the periphery of the opening is disposed on the sealing layer. The sealing layer is formed of a glass or polymeric material susceptible to deformation by fluctuation. An independent claim is also included for a process of fabricating a micro-cavity of a micro-component.
Inventors:
Philip, Robert
Application Number:
JP2006544493A
Publication Date:
December 12, 2012
Filing Date:
December 14, 2004
Export Citation:
Assignee:
Comisaria Allenergy Atomic Eo Energy Alternative
International Classes:
B81B7/02; B81B7/00; B81C1/00; G01P1/02; H01L21/54; H01L21/56; H01L23/10
Domestic Patent References:
| JP2002365153A | ||||
| JP8116016A | ||||
| JP6085010A | ||||
| JP4068551A | ||||
| JP2000124470A | ||||
| JP63177057U | ||||
| JP2001209034A | ||||
| JP10106972A | ||||
| JP2001323100A | ||||
| JP2003156844A |
Foreign References:
| DE10005555A1 | ||||
| US5013871 | ||||
| US5477008 | ||||
| WO2001046066A2 | ||||
| WO2003089368A2 |
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Akaoka Akira
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Akaoka Akira