Title:
密封されたマイクロキャビティを備えるマイクロ部品及びそのようなマイクロ部品の製造方法
Document Type and Number:
Japanese Patent JP4869943
Kind Code:
B2
Abstract:
The micro-component has a hermetic micro-cavity (6) delimited by a cover comprising two layers (4, 7). A third layer (9) is disposed between the layers (4, 7). An additional micro-cavity (11) communicating with an opening in the layer (7) is disposed between the layers (4, 7). An additional opening adjacent to the cavity (11) is formed in the layer (9), offcentered with respect to an opening (5) and delimited by the layer (7). An independent claim is also included for a process of fabricating a hermetic micro-cavity of a micro-component.
Inventors:
Philip, Robert
Application Number:
JP2006544492A
Publication Date:
February 08, 2012
Filing Date:
December 14, 2004
Export Citation:
Assignee:
Comisaria Allenergy Atomic Eo Energy Alternative
International Classes:
B81B3/00; B81B7/00; B81C1/00; G01P1/02; H01L21/54; H01L21/56; H01L23/10
Domestic Patent References:
| JPH05332852A | 1993-12-17 | |||
| JPH09148467A | 1997-06-06 |
Foreign References:
| WO2001058804A2 | 2001-08-16 |
Attorney, Agent or Firm:
Kenji Yoshitake
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Akaoka Akira
Hidetoshi Tachibana
Yasukazu Sato
Hiroshi Yoshimoto
Yasushi Kawasaki
Akaoka Akira