Title:
MICROPATTERN TRANSFER DEVICE/METHOD
Document Type and Number:
Japanese Patent JP2008162135
Kind Code:
A
Abstract:
To provide a micropattern transfer device capable of rapidly transferring a micropattern to a thin substrate.
This micropattern transfer device is operated in the following way: first, a stamper is layered on a thermoplastic sheet, then this layered product inserted between the first tool and the second tool of a fixture, is held by two pieces of parallel flat plates, and heated/pressed. Thus a micropattern engraved in the stamper is transferred to the surface of the thermoplastic sheet. Before the heating and pressing process by the parallel flat plates, the layered product is inserted between the third tool and the fourth tool of the fixture, both heated, in the layered direction and preheated.
Inventors:
IDO HIROSHI
KAJIWARA AKIHIKO
YAMANAKA HIDEAKI
KISHI HIROYUKI
KAJIWARA AKIHIKO
YAMANAKA HIDEAKI
KISHI HIROYUKI
Application Number:
JP2006354421A
Publication Date:
July 17, 2008
Filing Date:
December 28, 2006
Export Citation:
Assignee:
HITACHI MAXELL
International Classes:
B29C59/02; H01L21/027
Attorney, Agent or Firm:
Yusuke Hiraki
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