Title:
マイクロポジションギャップセンサ組立体
Document Type and Number:
Japanese Patent JP6688144
Kind Code:
B2
Abstract:
A micro-position gap sensor assembly including a structural housing and a flexible diaphragm fixedly attached forming a barrier against fluid ingress. The structural housing includes a shaft orthogonally attached to the flexible diaphragm, a first retainer including one or more standoffs, a second retainer, and a parallel plate gap sensor. The parallel gap plate sensor includes a non-contact sensor plate biased against a portion of the first retainer defining a plane of the non-contact sensor plate and receiving a biasing force in opposition of the first retainer from the second retainer, a target plate comprised of a conductive paramagnetic material. The parallel plate gap sensor is configured such that displacement of one of the target plate or the non-contact sensor plate changes a distance between the target plate and the non-contact sensor plate.
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Inventors:
Lowry Patrick Allen
Dick John Thomas
Kramer Michael Alex
Dick John Thomas
Kramer Michael Alex
Application Number:
JP2016086770A
Publication Date:
April 28, 2020
Filing Date:
April 25, 2016
Export Citation:
Assignee:
HORIBA STEC Co., Ltd.
International Classes:
F16K37/00; G01B21/16
Domestic Patent References:
| JP2012070458A1 | ||||
| JP10206500A | ||||
| JP58114704U | ||||
| JP63175807U | ||||
| JP2007139769A |
Foreign References:
| US20090027618 |
Attorney, Agent or Firm:
Ryuhei Nishimura
Saito Shindai
Saito Shindai