PURPOSE: To make a pump compact and improve power performance by forming a piston into a movable electrode, whereas forming a cylinder into a fixed electrode, and applying an alternating current to these to operate the piston by electrostatic attracting force, thereby integrating a pump body and a drive source.
CONSTITUTION: This micropump is mainly constituted of plural semiconductor substrates 1, 2 as a principle. Plural check valves 3a, 3b, a piston electrode 4 and a conductive support 5 for supplying electric power while supporting the piston electrode 4 are respectively formed at one semiconductor substrate 2. A diffusion area 6 to be a cylinder fixed electrode is formed at the other semiconductor substrate 1. That is, a piston is formed into the movable electrode 4, and a cylinder is formed into the fixed electrode 6. When an alternating current is applied to these, the piston, the movable electrode 4, is operated by electrostatic attracting force. A pump body and a drive source are thereby integrated so as to make the pump compact and improve transmission efficiency.
Tsuyoshi Kudo
Takamura Kitamura
Ryo Tsukamoto
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