Title:
MICROPUMP, MICROMIXER, MICROMACHINE DEVICE, MICRO MOVABLE MIRROR AND OPTICAL SWITCH
Document Type and Number:
Japanese Patent JP2002355798
Kind Code:
A
Abstract:
To provide a micromachine that is inexpensive and disposable by using an epoxy-based photosensitive resin and easily ensuring an increased wall thickness without lamination, and a manufacturing method thereof.
A micromachine device comprises an epoxy-based photosensitive resin itself as a structural material. A semiconductor photolithography technique can prepare by batch treating three-dimensional structure of resin without an assembly process to thereby facilitate microminiaturization and complication of a resin device and reduce cost. Enabled integration with a processing circuit can repress a problem of, for example, stray capacity to enable incorporation of a device such as a high precision sensor.
Inventors:
KOIDE AKIRA
SATO TOMOMI
TANABE SHINICHI
MIYAKE AKIRA
SATO TOMOMI
TANABE SHINICHI
MIYAKE AKIRA
Application Number:
JP2001167707A
Publication Date:
December 10, 2002
Filing Date:
June 04, 2001
Export Citation:
Assignee:
HITACHI LTD
HITACHI ULSI SYS CO LTD
HITACHI ULSI SYS CO LTD
International Classes:
G02B26/08; B81B3/00; B81C1/00; F04B9/00; F04B43/02; F04B43/04; F04B53/10; (IPC1-7): B81B3/00; B81C1/00; F04B9/00; F04B43/02; F04B43/04; F04B53/10; G02B26/08
Attorney, Agent or Firm:
Katsuo Ogawa (2 outside)