To provide a micropump easy to mold and machine and miniaturizable.
The micropump 1 comprises: a chamber 3 formed in a base 2; a chamber nozzle 4 formed in the chamber 3; a chamber driving part 5 for increasing/reducing the volume of the chamber 3; an outflow channel 7 formed in the direction of the center axis of the chamber nozzle 4; an inflow channel 9 formed along a direction different from the flowing-out direction of the outflow channel 7; an outflow nozzle 6 of the outflow channel 7; an inflow nozzle 8 of the inflow channel 9 and a chamber nozzle 4 arranged with their openings facing the same crossing space part 10; and an avoiding space part 16 provided in the inflow channel 9 for avoiding the collision with flowing-in fluid when part of the fluid discharged from the chamber nozzle 4 passes through the inflow channel 9. The inflow channel 9 and the outflow channel 7 are different from each other in flow path resistance so that the flow path resistance of the former is lower than that of the latter.
DAU THANH VAN
SAKAMOTO RYUHEI
SUGIYAMA SUSUMU
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