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Patent Searching and Data


Title:
MICROPUMP
Document Type and Number:
Japanese Patent JPH0681762
Kind Code:
A
Abstract:

PURPOSE: To use a micropump having a working chamber, an intake valve and a discharge valve formed from silicon wafers for gas.

CONSTITUTION: A micropump having a working chamber 1, an intake valve 2 and a discharge valve 3 is provided. The valves 2, 3 are formed integrally with silicon wafers. The gas in the working chamber 1 is heated by a heating element 6 so that an overpressure is produced in the working chamber. Partial vacuum is generated by cooling the gas in the working chamber. The pump action of the micropump is achieved through the succession of overpressure and partial vacuum.


Inventors:
Trah, Hans-peter
Application Number:
JP1993000143382
Publication Date:
March 22, 1994
Filing Date:
June 15, 1993
Export Citation:
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Assignee:
ROBERT BOSCH GMBH
International Classes:
F04B9/00; F04B19/00; F04B19/24; (IPC1-7): F04B9/00
Attorney, Agent or Firm:
矢野 敏雄 (外2名)