PURPOSE: To suppress the fluctuation of flow velocity of fluid to be fed out due to the fluctuation of input pressure and flow-out of the fluid during the stop of a micropump, make the micropump compact, facilitate its assembly, and reduce dispersion of product quality.
CONSTITUTION: In a micropump which is provided with an input port 25, an output port 27, a fluid flow space 22 between the input port 25 and the output port 27, first vibration members 30, 72, 70 for opening and closing a section between the fluid flow space 22 and the input port 25, second vibration members 30, 82, 80 for opening and closing a section between the fluid flow space 22 and the output port 27, and at least one of third vibration members 10, 92, 90 for expanding and shrinking the fluid flow space 22, pressure compensation means 50, 61, 68 which give pressure substantially equal to pressure of fluid at the input port 25 are provided in a space 41 in which the first vibration members 30, 72, 70 vibrate outside of the fluid flow space 22.
NARUSE YOSHIHIRO
YAMADA TAKAHIRO
TSUKAHARA KINJI
ANDO MITSUHIRO
TSUCHIMOTO KATSUYA
