To provide a microscope apparatus capable of high-speed observation for a structured lighting microscope apparatus having hyperresolution.
In a diffraction grating 51 shown in a drawing (a), a planar body 52 can be slid in a transparent guide 54 in a direction of an arrow and further a grating pattern 53a having a direction perpendicular to a moving direction, a grating pattern 53b having a direction inclined to the moving direction by 60° and a grating pattern 53c having a direction inclined to the moving direction by -60° are formed. By sliding the planar body 52, one among the grating pattern 53a, the grating pattern 53b and the grating pattern 53c is selected and can be used as the diffraction grating. Thereby the same effect as that rotating the diffraction grating by 0°, 120° and 240° can be obtained. Since positioning for selecting the grating pattern does not require high accuracy, high-speed selection of the grating pattern can be executed compared to the case when the diffraction grating is rotated.
COPYRIGHT: (C)2007,JPO&INPIT
YONEZAWA YASUO
KAWAHITO TAKASHI
