Title:
顕微鏡装置
Document Type and Number:
Japanese Patent JP5267161
Kind Code:
B2
Inventors:
Masaaki Tamura
Application Number:
JP2009017632A
Publication Date:
August 21, 2013
Filing Date:
January 29, 2009
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B21/00; G02B21/08; G02B21/14
Domestic Patent References:
| JP2007219319A | ||||
| JP2002174769A | ||||
| JP7084187A | ||||
| JP2008281983A |
Foreign References:
| WO2009051081A1 |
Attorney, Agent or Firm:
Yoshio Inamoto
Takashi Nishikawa
Takashi Nishikawa