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Title:
MICROSCOPE EQUIPMENT AND RESOLVING METHOD OF MICROSCOPIC IMAGE
Document Type and Number:
Japanese Patent JP2008107557
Kind Code:
A
Abstract:

To provide microscope equipment capable of resolving a minute pattern exceeding the theoretical resolution of the microscope equipment, and to provide a resolution inspecting method using the microscope equipment.

The microscope equipment is provided with: a solid-state imaging element having a plurality of pixels; a magnification optical system which forms a magnified image of at least a part of an observation object on the pixels of the solid-state imaging element; and an image processing means which applies an edge emphasizing filter having differentiating effect to an image obtained by the solid-state imaging element and, thereby, obtains an edge emphasized image corresponding to the image, wherein the magnification optical system is provided with a variable magnification optical system for imaging a linear part included in an observation region on the surface of the observation object as an image having a width which exceeds the size of individual pixel constituting the solid-state imaging element and is equal to or less than the width of an area processed by the edge emphasizing filter.


Inventors:
SHIBATA HIROMASA
Application Number:
JP2006290070A
Publication Date:
May 08, 2008
Filing Date:
October 25, 2006
Export Citation:
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Assignee:
NIKON CORP
International Classes:
G02B21/36; G02B21/24; G06T5/20; H04N5/225
Domestic Patent References:
JP2002031758A2002-01-31
JPH07248453A1995-09-26
JPH0915506A1997-01-17
JPH1068616A1998-03-10
JP2003046782A2003-02-14
JPH10243224A1998-09-11
JPH0816773A1996-01-19
Attorney, Agent or Firm:
Furuya Fumio
Toshihide Mori