To more effectively acquire and analyze image data.
In a method for operating a charged-particle microscope, a first image of a first region of an object is recorded by a first setting, and a second image of a second region is recorded by a second setting. The second setting is different from the first setting in view of at least one of kinetic energy of a primary charged particle, a detector setting, a beam current, and a pressure in a measuring chamber. A third image of a third region at least partially including the first region and the second region is recorded. At least one part of the third image is displayed, and expression of the first image is at least partially displayed in the displayed third image. The expression of the first image includes a first indicator indicating the first setting. Expression of the second image is at least partially displayed in the displayed third image. The expression of the second image includes a second indicator indicating the second setting, and the displayed second indicator is different from the displayed first indicator.
ROGER ROLAND
SIMON HEATH
| JP2010097768A | 2010-04-30 |
Groundwork Kenichi
Tsubouchi Shin