Title:
顕微鏡システム
Document Type and Number:
Japanese Patent JP4332905
Kind Code:
B2
Inventors:
Masaya Yamaguchi
Akitoshi Suzuki
Akitoshi Suzuki
Application Number:
JP2993398A
Publication Date:
September 16, 2009
Filing Date:
February 12, 1998
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B21/26; G02B21/36; G05D3/12
Domestic Patent References:
| JP10274650A |
Attorney, Agent or Firm:
Furuya Fumio
Eisuke Suzuki
Eisuke Suzuki