Title:
MICROSCOPE
Document Type and Number:
Japanese Patent JPH05127088
Kind Code:
A
Abstract:
PURPOSE:To provide the microscope with a small stage stroke and light in weight capable of observing large samples. CONSTITUTION:In the microscope, all ranges of the sample on the stage can be observed by shifting a stage 4 parallel to one direction in the X-Y direction to be crossed each other on the plane crossing the optical axis of an objective lens 5 and shifting the objective lens parallel to the other direction.
Inventors:
FURUHASHI HIDEHIKO
FUTABOSHI TOSHIAKI
FUTABOSHI TOSHIAKI
Application Number:
JP28514191A
Publication Date:
May 25, 1993
Filing Date:
October 30, 1991
Export Citation:
Assignee:
NIKON CORP
International Classes:
G02B21/00; G02B21/26; (IPC1-7): G02B21/00