Title:
微小構造体の検査装置、微小構造体の検査方法および微小構造体の検査プログラム
Document Type and Number:
Japanese Patent JP4387987
Kind Code:
B2
Abstract:
Test sound wave is outputted from a speaker (2). A movable part of a three-axis acceleration sensor, which is a micro structure of a chip to be tested TP, moves due to the arrival of the test sound wave which is compression wave outputted from the speaker (2), that is, due to air vibrations. A change in the resistance value that changes in accordance with this movement is measured on the basis of an output voltage that is provided via probe needles (4). A control part (20) determines the property of the three-axis acceleration sensor on the basis of the measured data.
Inventors:
Katsuya Okumura
Toshiyuki Matsumoto
Naoki Ikeuchi
Hachikabe Masami
Toshiyuki Matsumoto
Naoki Ikeuchi
Hachikabe Masami
Application Number:
JP2005160701A
Publication Date:
December 24, 2009
Filing Date:
May 31, 2005
Export Citation:
Assignee:
株式会社オクテック
東京エレクトロン株式会社
東京エレクトロン株式会社
International Classes:
G01P21/00; B81C99/00; G01C19/56; G01C19/5719; G01C25/00; G01N29/00; G01N29/09; G01N29/12; G01N29/30; G01N29/42; G01N29/46; G01P15/12; H01L29/84
Domestic Patent References:
| JP534371A | ||||
| JP933567A | ||||
| JP1502581A | ||||
| JP267956A | ||||
| JP6313785A | ||||
| JP112643A |
Attorney, Agent or Firm:
Kimura Mitsuru
Koji Yashima
Koji Yashima