Title:
微細構造転写装置および微細構造転写方法
Document Type and Number:
Japanese Patent JP5222471
Kind Code:
B2
Inventors:
Masahiko Ogino
Man Hasegawa
Akihiro Miyauchi
Man Hasegawa
Akihiro Miyauchi
Application Number:
JP2006344715A
Publication Date:
June 26, 2013
Filing Date:
December 21, 2006
Export Citation:
Assignee:
株式会社日立製作所
International Classes:
B29C59/04
Domestic Patent References:
| JP2005297277A | ||||
| JP2003011218A | ||||
| JP2006326948A | ||||
| JP2003208051A |
Attorney, Agent or Firm:
Polaire Patent Business Corporation