PURPOSE: To simplify construction and controllability so as to improve reliability as an injector and the like.
CONSTITUTION: A microvalve device is constructed of a three-layer structure consisting of a supporting layer 11, an intermediate layer 12, and a coating layer 13, and in the intermediate layer 12, a closing member 16, a diaphragm 17, and a seat member 18 are constructed so as to be set inside a space chamber is formed in the coating layer 13. The diaphragm 17 is clamped between the supporting layer 11 and the coating layer 13, and pressure fluide is inputted from an inlet joint part 19 into the space chamber 15, while in the coating layer 13, a fluid outlet 22 is formed opposedly to a face facing the seat member 18. A seal part 181 of the seat member 18 is brought into contact with surroundings of the fluid outlet 22. In the supporting layer 11. a recessed chamber 20 is formed on the opposed face to the closing member 16, and the recessed chamber 20 and the fluid outlet 22 are communicated with each other by a communicating port 23. A pressurized face A of the seat member 18, on which an input fluid pressure is set, is provided with a larger area than the opposed pressurized face B.
| JPH04105661 | [Title of the device] Diaphragm device |
| WO/2005/069816 | DIAPHRAGM VALVE WITH PIVOTING CLOSURE MEMBER |
SASAGE TAKAHIRO
MATSUMOTO SHUICHI
KUROYANAGI MASATOSHI
