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Patent Searching and Data


Title:
MICROVALVE AND MANUFACTURE THEREOF
Document Type and Number:
Japanese Patent JPH0379879
Kind Code:
A
Abstract:

PURPOSE: To enable mass production by disposing two valve plate members to face each other, providing a valve seat on one valve plate member, and providing a valve member on the other for achieving high precision tightness by complementary formation of them even when the two valve plate members are of a relatively low precision.

CONSTITUTION: A valve member 12 and a valve port 14 of the same size and of mutually complementary form are provided on a valve plate member 10 of machining starting material. A separation layer 16 is then formed on the valve plate member 10, a cover plate is provided on the valve plate 10, and a die 18 is formed in a casting method, for example, so its form is a correct replica of the valve plate member 10. The separation layer 16 is removed, a back surface of the die 18 is polished, and a valve member 20 and a valve part 22 are formed, where the valve part 22 has the same form as the valve port 14. Orientation of corresponding sealing surfaces of the valve plate members 10, 20 is correctly formed by the sealing surface of the valve plate 10 to achieve high precision matching, thereby the valve plate member 10 can be manufactured at a relatively low precision.


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Inventors:
BERUNDO KOBANTSU
DOKUTAA DEIRUKU SHIYUMITSUTO
DOKUTAA BORUFUGANGU EERUFUIIRU
Application Number:
JP13817190A
Publication Date:
April 04, 1991
Filing Date:
May 28, 1990
Export Citation:
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Assignee:
BIRUKERUTO GMBH WERK INGERUFUI
KERNFORSCHUNGSZ KARLSRUHE
International Classes:
F16K31/02; B23P15/00; F15B13/00; F15C5/00; F16K1/00; F16K99/00; H01L41/12; (IPC1-7): F16K31/02
Attorney, Agent or Firm:
Toshio Takayama