To provide a microwave firing furnace for firing a treated object at high temperatures similar to that in a firing furnace for fine ceramics application, using a firing furnace for firing ceramic ware at a firing temperature of 1300°C or so, e.g., without increasing cost.
A susceptor 104 is formed of a material which mainly uses a substance having heat insulating property and small microwave loss. Microwave heating is applied to the susceptor 104 storing the treated object 105, and the temperature of the treated object is measured to control the temperature of the treated object. When a temperature in the furnace is monitored and it exceeds an upper limit temperature for ceramic ware application, the microwave heating is stopped. Thus, the firing furnace for ceramic ware application is used for firing the treated object 105 at a high temperature similar to that in the firing furnace for fine ceramic application without giving damage thereto due to the high temperature.
FUSEJIMA JUNICHI
HISAMATSU YOSHIHIRO
Toshimitsu Ichikawa
Kimihide Hashimoto
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