Title:
MICROWAVE IRRADIATION DEVICE
Document Type and Number:
Japanese Patent JP2011060637
Kind Code:
A
Abstract:
To provide a microwave irradiation device which achieves size reduction while avoiding a size increase of equipment, and can be burned by maximally taking advantage of a microwave and microwave plasma.
The microwave irradiation device includes a solid microwave source for generating the microwave, and an irradiation portion 3 for irradiating an irradiation object with the microwave generated by the solid microwave source. The irradiation portion 3 is composed of a TEM mode resonator having a center conductor 22 arranged by axially extending and to which the microwave generated by the solid microwave source is supplied, and a cylindrical outer conductor 23 formed around the center conductor 22 concentrically with the center conductor 22.
Inventors:
FUJII SATORU
Application Number:
JP2009210171A
Publication Date:
March 24, 2011
Filing Date:
September 11, 2009
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H05B6/72; H05B6/74
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Kazuhiko Miyasaka
Osamu Suzawa
Kazuhiko Miyasaka
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