Title:
MICROWAVE PLASMA GENERATING DEVICE
Document Type and Number:
Japanese Patent JP3537532
Kind Code:
B2
Abstract:
PURPOSE: To facilitate the start of discharge by arranging a discharge start auxiliary means in a prescribed position within a plasma generating chamber.
CONSTITUTION: The microwave generated in a microwave generating device is propagated through a linear waveguide 6, and supplied to the plasma generating chamber 8 of a rectangular waveguide to generate a plasma by discharge. In the position corresponding to the mountain of the microwave voltage steady wave of this chamber 8, dielectric pieces in the field direction of discharge start auxiliary means 8a, 8b or the dielectric pieces covered with a metal are arranged, the microwave field is collected to the narrow clearance of the chamber 8, and the field intensity exceeds a threshold Eth. Thus, the discharge start can be facilitated and ensured with a simple structure.
Inventors:
Kondo, Kazuyoshi
Taniguchi, Michio
Aoyama, Takahiro
Kaneko, Eiji
Taniguchi, Michio
Aoyama, Takahiro
Kaneko, Eiji
Application Number:
JP10014495A
Publication Date:
June 14, 2004
Filing Date:
March 31, 1995
Export Citation:
Assignee:
DAIHEN CORP
International Classes:
H05H1/46; C23F4/00; H01L21/205; H01L21/302; H01L21/3065; (IPC1-7): H05H1/46; C23F4/00; H01L21/205; H01L21/3065
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