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Patent Searching and Data


Title:
MICROWAVE TREATING DEVICE
Document Type and Number:
Japanese Patent JPS59125628
Kind Code:
A
Abstract:
PURPOSE:To prevent the damage of a packing keeping a treating chamber airtight due to a reaction between the packing and active seeds by disposing a flowing-water pipe cooling the packing near the packing. CONSTITUTION:The packing, an O ring 13, is arranged between a microwave transmitting window 5 and the wall surface of the etching treating chamber 6 consisting of aluminum, and the flowing-water pipe 20 cooling the O ring 13 is penetrated and disposed into the wall of the etching treating chamber 6 in the vicinity of the O ring 13. Consequently, a leakage is not generated even when 150hr or more pass under the same conditions though the O ring 13 is damaged for approximately 90-100hr and a leakage is generated in a conventional device. Since the etching treating chamber 6, for example, consists of an aluminum material of excellent thermal conductivity, the O ring 13 can be cooled efficiently, and the reaction between the active seeds of a reaction gas and the O ring 13 can further be inhibited.

Inventors:
FUJIMURA SHIYUUZOU
YANO HIROSHI
Application Number:
JP23392382A
Publication Date:
July 20, 1984
Filing Date:
December 29, 1982
Export Citation:
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Assignee:
FUJITSU KK
International Classes:
H01L21/302; H01J37/18; H01L21/3065; (IPC1-7): H01L21/302
Domestic Patent References:
JPS5696842A