Title:
MIM TYPE ELECTRIC CELL AND ITS MANUFACTURE AND INFORMATION TRANSFER DEVICE, IMAGE DISPLAY DEVICE, AND LITHOGRAPHIC DEVICE
Document Type and Number:
Japanese Patent JP3437195
Kind Code:
B2
Abstract:
PURPOSE: To provide a MIM type electric cell basically constituted of a metal/ insulator/metal sandwich structure where the insulator does not break down even under a strong electric field.
CONSTITUTION: An electrode substrate made of noble metal crystals where an upper electrode 104 and a base electrode 102 sandwiches a barrier layer 103 made of an insulator or a semiconductor with the base electrode 102 formed over the substrate 101, and an electrode where the domain boundary of the noble metal crystals is formed linear with the orientation scatter angle by X-ray diffraction set at 1° or less.
Inventors:
Ken Eguchi
Toshihiko Takeda
▲瀧▼本 清
Haruki Kawata
Tsutomu Ikeda
Toshihiko Takeda
▲瀧▼本 清
Haruki Kawata
Tsutomu Ikeda
Application Number:
JP24720092A
Publication Date:
August 18, 2003
Filing Date:
August 25, 1992
Export Citation:
Assignee:
Canon Inc
International Classes:
H01J1/312; C30B7/00; G02F1/1365; H01J1/30; H01J9/02; H01J29/04; H01J31/12; H01J31/15; H01J37/073; H01L45/00; H01L49/02; (IPC1-7): H01L49/02; G02F1/1365; H01J1/30; H01J9/02; H01J31/15
Domestic Patent References:
| JP63161552A | ||||
| JP4133235A | ||||
| JP5303774A |
Attorney, Agent or Firm:
Keisuke Watanabe
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