Title:
MINI BATCH VERTICAL FURNACE FOR SUBSTRATE
Document Type and Number:
Japanese Patent JP2003197554
Kind Code:
A
Abstract:
To provide a mini batch vertical furnace for substrate that can be manufactured inexpensively.
A FOUP 11 is loaded in a switchgear 10, and the number of wafers W corresponding to the number of mini batches housed in the FOUP 11 are directly transferred to the boat 4 of a hoist gear 5 by means of a substrate transfer device 6. After heat treatment, the wafers W on the boat 4 are directly returned to the FOUP 11 by means of the device 6.
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Inventors:
NISHIMURA KEISUKE
FUKUYAMA YOSHIHARU
FUKUYAMA YOSHIHARU
Application Number:
JP2001394380A
Publication Date:
July 11, 2003
Filing Date:
December 26, 2001
Export Citation:
Assignee:
KOYO THERMO SYS KK
International Classes:
H01L21/677; H01L21/205; H01L21/22; H01L21/68; (IPC1-7): H01L21/22; H01L21/205; H01L21/68
Attorney, Agent or Firm:
Takafumi Watanabe (1 person outside)
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