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Title:
MINI-ENVIRONMENT DEVICE, INSPECTION DEVICE, MANUFACTURING DEVICE, AND SPACE CLEANING METHOD
Document Type and Number:
Japanese Patent JP2008032335
Kind Code:
A
Abstract:

To provide a mini-environment device capable of keeping target cleanliness of a specific space by restraining influence of cleanliness of the outside world, and to provide an inspection device, a manufacturing device, and a space cleaning method.

This mini-environment device is provided with: an external dust collection filter 3a covering an inlet 2b of a housing 2; an external fan 3b guiding air of the outside world into the housing 2 therethrough; a cleaning chamber 4a arranged in the housing 2 and having an inlet 4b facing a space in the housing 2; an internal duct collection filter 5a covering the inlet 4b; an internal fan 5b guiding the air in the housing 2 into the cleaning chamber 4a therethrough; a manometer 6a measuring the pressure of the outside world of the housing 2; a manometer 6b measuring the pressure in the housing 2; a manometer 6c measuring the pressure in the cleaning chamber 4a; and a control means 7 controlling the numbers of revolutions of the fans 3a and 5a so that the measured pressure Pb in the housing 2 is set higher by a set value P1 than the measured pressure Pa of the outside world, and the measured pressure Pc in the cleaning chamber 4a is set higher by a set value P2 than the measured pressure Pb in the housing 2.


Inventors:
JINGU TAKAHIRO
MIYAZAKI YUSUKE
ZAMA KAZUHIRO
Application Number:
JP2006000207774
Publication Date:
February 14, 2008
Filing Date:
July 31, 2006
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP
International Classes:
F24F7/06; H01L21/02; H01L21/677
Domestic Patent References:
JP2000082731A2000-03-21
JP2002022227A2002-01-23
JP2006125812A2006-05-18
JP2000257909A2000-09-22
JP2002231782A2002-08-16
JPH11278604A1999-10-12
JP2005019739A2005-01-20
Attorney, Agent or Firm:
Kasuga