Title:
MINIATURE GAS CONTROL DEVICE
Document Type and Number:
Japanese Patent JP2019035402
Kind Code:
A
Abstract:
To provide a miniature gas transportation device applied to a compact measuring instrument or equipment.SOLUTION: A miniature gas control device is disclosed, and includes a miniature gas transportation device and a miniature valve device inside. The miniature gas transportation device is constituted by sequentially stacking a protective film, a gas inlet plate, a resonance plate and a piezoelectric actuator, and the miniature valve device is constituted by sequentially stacking a gas collecting plate, a valve piece and a gas outlet plate. Both devices allow the gas to enter from the gas inlet plate, and flow into the miniature valve device through the resonance piece, and further open and close a valve hole corresponding to the gas outlet plate, of the valve piece of the miniature valve device to perform pressure collecting or pressure releasing operation.SELECTED DRAWING: Figure 7A
Inventors:
MOU HAO-JAN
LIAO HUNG-HSIN
CHIN SEISHIYOU
LIAO JIA-YU
CHEN SHIH-CHANG
HAN YUNG-LUNG
LEE WEI-MING
LIAO HUNG-HSIN
CHIN SEISHIYOU
LIAO JIA-YU
CHEN SHIH-CHANG
HAN YUNG-LUNG
LEE WEI-MING
Application Number:
JP2018143304A
Publication Date:
March 07, 2019
Filing Date:
July 31, 2018
Export Citation:
Assignee:
MICROJET TECHNOLOGY CO LTD
International Classes:
F04B45/047
Domestic Patent References:
| JP2017133506A | 2017-08-03 | |||
| JP2009103111A | 2009-05-14 | |||
| JP2013229281A | 2013-11-07 |
Foreign References:
| DE102012101861A1 | 2013-09-12 |
Attorney, Agent or Firm:
Hitoshi Shinbo