To provide a minute electromagnetic device manufacturing method for manufacturing a small minute-electromagnetic device at an arbitrary place and into an arbitrary shape by using FIB-CVD, and a minute electromagnetic device manufactured by the method.
The minute electromagnetic device manufacturing method is used for manufacturing the minute electromagnetic device composed of an iron core 35 and a DLC coil 36 on the tip face of a glass capillary 31 by controlling the irradiation position of a focused ion beam of a FIB-CVD device emitting the focused ion beam to a material gas, beam strength, irradiation time, irradiation interval, and irradiation direction from drawing data based on a three-dimensional structure model of the minute electromagnetic device designed by using a three-dimensional CAD.
OZASA AKIYOSHI
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