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Title:
MINUTE ELECTROMAGNETIC DEVICE MANUFACTURING METHOD AND MINUTE ELECTROMAGNETIC DEVICE MANUFACTURED THEREBY
Document Type and Number:
Japanese Patent JP2007069325
Kind Code:
A
Abstract:

To provide a minute electromagnetic device manufacturing method for manufacturing a small minute-electromagnetic device at an arbitrary place and into an arbitrary shape by using FIB-CVD, and a minute electromagnetic device manufactured by the method.

The minute electromagnetic device manufacturing method is used for manufacturing the minute electromagnetic device composed of an iron core 35 and a DLC coil 36 on the tip face of a glass capillary 31 by controlling the irradiation position of a focused ion beam of a FIB-CVD device emitting the focused ion beam to a material gas, beam strength, irradiation time, irradiation interval, and irradiation direction from drawing data based on a three-dimensional structure model of the minute electromagnetic device designed by using a three-dimensional CAD.


Inventors:
MATSUI SHINJI
OZASA AKIYOSHI
Application Number:
JP2005260588A
Publication Date:
March 22, 2007
Filing Date:
September 08, 2005
Export Citation:
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Assignee:
JAPAN SCIENCE & TECH AGENCY
International Classes:
B81C99/00; C23C16/48; H01F41/04; H04R23/00; H04R31/00
Domestic Patent References:
JP2004345009A2004-12-09
JPH0243714A1990-02-14
JPH11313392A1999-11-09
JPH10276493A1998-10-13
JP2004174637A2004-06-24
JP2001107252A2001-04-17
JP2001332434A2001-11-30
JP2002260945A2002-09-13
JP2002221513A2002-08-09
Foreign References:
WO2004076343A12004-09-10
WO2004077536A12004-09-10
WO2002044079A12002-06-06
Attorney, Agent or Firm:
Mamoru Shimizu