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Title:
MINUTE ELECTROMECHANICAL TYPE DEVICE AND ITS MANUFACTURING METHOD
Document Type and Number:
Japanese Patent JP2007015080
Kind Code:
A
Abstract:

To provide a minute structural body manufactured at low cost and a device having the structural body.

This minute structural body is formed by using silicon layers made of thin films on an insulating substrate. This silicon layers can be applied to a semiconductor element for controlling the minute structural body and can be integrally formed on the insulating substrate. It is desirable that the silicon layers are polycrystalline silicon layers crystallized by using metal. In this invention, a micromachine having the minute structural body formed in this way can be provided.


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Inventors:
YAMAGUCHI MAYUMI
IZUMI KONAMI
Application Number:
JP2005200952A
Publication Date:
January 25, 2007
Filing Date:
July 08, 2005
Export Citation:
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Assignee:
SEMICONDUCTOR ENERGY LAB
International Classes:
B81B5/00; B81C1/00
Domestic Patent References:
JP2007021713A2007-02-01
JPH03294396A1991-12-25
JPH06335265A1994-12-02
JPH097946A1997-01-10
JPH1056186A1998-02-24
JP2004001201A2004-01-08
JPH07321339A1995-12-08
JP2000036599A2000-02-02
JPH04317571A1992-11-09
JP2004347982A2004-12-09
JP2003295783A2003-10-15
Foreign References:
US20020096018A12002-07-25



 
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