Title:
Minute machinery measurement element
Document Type and Number:
Japanese Patent JP6130405
Kind Code:
B2
Abstract:
A micromechanical measuring element has a sensitive element that comprises a diaphragm with an underside and an upper side. The micromechanical measuring element also has a cap, which is connected directly to the sensitive element. The sensitive element and the cap form a first chamber, which has a first opening.
Inventors:
Ostrich, Bernhard
Michael Schiffer
Michael Schiffer
Application Number:
JP2014560291A
Publication Date:
May 17, 2017
Filing Date:
February 08, 2013
Export Citation:
Assignee:
EPCOS AG
International Classes:
G01L13/06; B81B3/00; G01F1/40; H01L29/84
Domestic Patent References:
| JP1503326A | ||||
| JP7103840A | ||||
| JP6427275A | ||||
| JP192634A | ||||
| JP200591166A | ||||
| JP8247873A | ||||
| JP7167724A |
Attorney, Agent or Firm:
Koji Nagato