Title:
Minute machinery measurement element
Document Type and Number:
Japanese Patent JP6236117
Kind Code:
B2
Abstract:
A micromechanical measuring element has a sensitive element that comprises a diaphragm with an underside and an upper side. The micromechanical measuring element also has a cap, which is connected directly to the sensitive element. The sensitive element and the cap form a first chamber, which has a first opening.
Inventors:
Ostrich, Bernhard
Schiffer, Michael
Schiffer, Michael
Application Number:
JP2016101010A
Publication Date:
November 22, 2017
Filing Date:
May 20, 2016
Export Citation:
Assignee:
EPCOS AG
International Classes:
G01L13/06; B81B3/00; G01L9/00; H01L29/84
Domestic Patent References:
| JP10073503A | ||||
| JP2005091166A | ||||
| JP7167724A | ||||
| JP1503326A | ||||
| JP8247873A |
Foreign References:
| EP2189773A2 | ||||
| US20090151464 |
Attorney, Agent or Firm:
Koji Nagato