PURPOSE: To provide a simple-structured small-sized mirror-chamferring device capable of mirror-chamferring a wafer periphery describing a smooth curve in a sectional arc shape simply by adsorption-holding a single surface of the wafer as well as extending the life of a polishing cloth.

CONSTITUTION: The mirror-chamferring device is composed of a polishing cloth adhering rotary surface plate 1 and an absorption plate 11 movable in the rotary axle L1 direction (Z direction) of the rotary surface plate 1 and in the direction (X direction) perpendicular to the Z axial direction as well as pivotal around the axle perpendicular to the rotary axle L1 further rotatably supported around the axle L3 perpendicular to the axle L1. Finally, when a wafer W periphery held by the vacuum-chuck plate 11 is pressed down on a polishing cloth 2 and the vacuum-cluck plate 11 is continuously pivoted while pouring a slurry, the outer periphery of the wafer W with single surface thereof only fixed to the vacuum plate 11 can be mirror-chamferred in the smooth arc shaped section by the polishing cloth 2.