To facilitate fluctuation of kinds of supplied gas and its flow rate adjusting range by connecting a receiving piping, a connection piping and a feeding-out piping to each flow rate adjusting unit or a gas supply main unit through detachable pipe joints.
A receiving piping 27 which supplies gas to each flow rate adjusting unit 1, a connection piping 28 which connects across the flow rate adjusting unit 1 and a gas supply main unit 2, and a feeding-out piping 29 which supplies gas from the gas supply main unit 2 to the external consumption equipment are connected to the flow rate adjusting unit 1 and the gas supply main unit 2 through detachable pipe joints 16, 17, 21, 29. Gas is supplied from the external gas source to each flow rate adjusting unit 1 through the receiving piping 27 and the pipe joint 16. After adjusting its flow rate, the gas is fed to the gas supply main unit 2 through the pipe joint 17, the connection piping 28 and the pipe joint 21. It is mixed in a manifold 22, and fed to plural external consumption arrangements through a stopping valve 23, a check valve 24, and the pipe joint 29.
SAITO HIDEO
NISHIHARA HIROMI
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