Title:
移動体装置、露光装置及び露光方法、並びにデバイス製造方法
Document Type and Number:
Japanese Patent JP5532215
Kind Code:
B2
Abstract:
In a measurement device, positional information of a mark of an object is measured. A holding member that holds the object, with a movable member that is supported by levitation on a base member, moves so that the mark is detected with a detection system having an optical member that irradiates the mark with a detection light, the base member being disposed below the detection system so that a surface of the base member is substantially parallel to a predetermined plane. The holding member is supported by the movable member and has a mounting area for the object on an upper surface side of the holding member in a direction orthogonal to the predetermined plane and being provided with a measurement surface on a lower surface side of the holding member, the measurement surface having a grating.
Inventors:
Yuichi Shibasaki
Application Number:
JP2009287340A
Publication Date:
June 25, 2014
Filing Date:
December 18, 2009
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
H01L21/027; G01B11/00; G03F7/20; H01L21/68
Domestic Patent References:
| JP2000187338A |
Foreign References:
| WO2007083758A1 | ||||
| WO2008038752A1 |
Attorney, Agent or Firm:
Atsushi Tateishi