To provide a model preparing device by which high-precision quality-model can be prepared even when there are small number of samples of the same recipe.
The device includes: a process data editing part 22 for extracting process feature value from process data acquired in time series during the time that a process is carried out; an inspection data editing part 27 for finding difference between a measurement value in inspection data which is information for inspection result of an object processed in the process and a design value; and an analysis part 32 which, when analysis by data mining and multivariate analysis, etc. are carried out by using the process feature value and the inspection data, a process-quality model is prepared with the difference between the measurement value obtained as a result of the process found by the inspection data editing part and the design value as target variables, and with the extracted process feature value data as explaining variables. By using the difference as the target variable, the data obtained by different recipes can be used as samples, so that required number of samples can be easily acquired, thereby the high-precision model can be prepared.
OBAYASHI SHIGERU
HAGIWARA KENICHIRO
AIKAWA TEIICHI
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