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Title:
MODULE TYPE FLUID PIPELINE DEVICE
Document Type and Number:
Japanese Patent JP2002372181
Kind Code:
A
Abstract:

To provide a fluid pipeline device appropriate for a module type fluid pipeline system and allowing easy access to the module for removal or change of the module.

This fluid pipeline device 50 for transporting the fluid to a fluid handling structural element 51 includes an upper module 56, a lower module 59 and a base block 60. The upper module 56 includes an upper passage 88, and the upper passage 88 is connected to the fluid handling structural element to be communicated with the fluid handling structural element through the fluid. The lower module 59 includes a lower passage 71, and the lower passage 71 is connected to the upper module 56 to be communicated with the upper passage 88 through the fluid. The base block 60 includes a receptacle 82 for housing the upper module 56 and a channel 68 for housing the lower module 59.


Inventors:
NGUYEN NHAN V
Application Number:
JP2002059114A
Publication Date:
December 26, 2002
Filing Date:
March 05, 2002
Export Citation:
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Assignee:
ASML US INC
International Classes:
B67D3/00; C23C16/455; F16K27/00; F16L39/00; F16L25/00; H01L21/205; (IPC1-7): F16L25/00; C23C16/455; F16L39/00; H01L21/205
Attorney, Agent or Firm:
Minoru Nakamura (9 outside)



 
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