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Title:
MOISTURE REFERENCE GAS GENERATOR
Document Type and Number:
Japanese Patent JPS59135342
Kind Code:
A
Abstract:

PURPOSE: To obtain moisture concn. known moisture reference gas with high accuracy by simple operation, by connecting a gas mixture bomb, a gas pressure regulating part and a hydrogen/oxygen gas reaction part while further providing a flow control part to the conduit of the inlet side or the outlet side of said hydrogen/oxygen gas reaction part.

CONSTITUTION: The gas mixture consisting of hydrogen, oxygen and nitrogen from a gas mixture bomb 1 is allowed to pass through a gas drying part (a glass drying column packed with a molecular sieve 3A) 2 to reduce the moisture concn. to 0.1ppm or less. Subsequently, gas pressure is controlled to constant pressure by a pressure regulating valve 3 and a manometer 4 while a flow amount is controlled by a flow amount control valve 5 and a flowmeter 6 and the dried gas is subsequently sent to and passed through a hydrogen/oxygen gas reaction tube 7 formed by packing a quartz glass tube with a platinum catalyst. At this time, the reaction tube 7 is heated to about 350°C by a heating oven 9 with a temp. regulator 8 provided therearound and, as a result, hydrogen gas and oxygen gas are reacted to form water while moisture reference gas is obtained.


Inventors:
FUJINO MASAKATSU
INANAGA SHIYOUJI
MORITA YOUZOU
HIRAI KENJI
Application Number:
JP908283A
Publication Date:
August 03, 1984
Filing Date:
January 21, 1983
Export Citation:
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Assignee:
SUMITOMO METAL IND
SHIMADZU CORP
International Classes:
G01N1/00; G01N33/00; (IPC1-7): G01N1/00
Domestic Patent References:
JPS55163428A1980-12-19
Attorney, Agent or Firm:
Shintaro Nogawa