To provide a manufacturing method for a mold which has transparency, mold releasing property, a mechanical strength, dimensional stability, and a highly precise micro-pattern, and has little deformation of the micro-pattern, and to provide a manufacturing method for a base material which can transfer the micro-pattern of the mold at a good dimensional accuracy, and has a transfer micro-pattern having little deformation of the transfer micro-pattern.
The mold 10 has a transparent base body (A) 12, an intermediate layer (C) 14, and a surface layer (B) 16. In this case, the transparent base body (A) 12 has a chemical bonding based on a functional group (x) on the surface on which the intermediate layer (C) 14 is formed, and keeps a difference (absolute value) of the linear expansion coefficient to the linear expansion coefficient of a fluorine-contained polymer (I) is less than 30 ppm/C, and the thermal deformation temperature at 100 to 300C. The intermediate layer (C) 14 has a fluorine-contained aliphatic ring structure in the main chain, and consists of the functional group (x) and a fluorine-contained polymer (II) having a reactant group (y) being reactant. The surface layer (B) 16 has a fluorine-contained aliphatic ring structure in the main chain, consists of the fluorine-contained polymer (I) which does not substantially have the reactant group (y), and has a micro-pattern 18 on the surface.
MIZUNO JUN
HENZA SHINGO
TSUNOSAKI KENTARO
KAWAGUCHI YASUHIDE
SAKANE YOSHIHIKO
ASAHI GLASS CO LTD
Masatake Shiga
Suzuki Mitsuyoshi
Noriko Yanai
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