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Patent Searching and Data


Title:
MOLD AND METHOD FOR PRODUCING THE SAME
Document Type and Number:
Japanese Patent JP2010225260
Kind Code:
A
Abstract:

To provide a mold and a method for producing the mold, which allow release of a duplicated plate formed on a groove-ridge shape of a Si original plate without generating chipped ridge portions of the duplicated plate.

The method for producing a mold 10 having a fine groove-ridge pattern on the surface thereof includes: a release layer forming step of forming, on a surface of the Si original plate 26 having a groove-ridge pattern, a release layer 16 made of a metal film containing a metal having an ionization tendency lower than that of hydrogen, for example, at least one metal selected from the group consisting of Pt, Os, Ir, Au, Ru and Pd; an electroforming step of electroforming, after the release layer 16 has been formed, a metal substrate 12 forming a mold; and a releasing step of releasing a duplicated plate including the release layer 16 and the metal substrate 12 from the Si original plate 26 after the electroforming step.


Inventors:
KIDO TAKEO
Application Number:
JP2010012218A
Publication Date:
October 07, 2010
Filing Date:
January 22, 2010
Export Citation:
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Assignee:
FUJIFILM CORP
International Classes:
G11B5/84; B29C33/38; B29C59/02; C25D1/00; C25D1/22
Attorney, Agent or Firm:
Yanagita Seiji
Go Sakuma