Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
MOLECULAR BEAM INTENSITY MONITOR
Document Type and Number:
Japanese Patent JPH06347554
Kind Code:
A
Abstract:

PURPOSE: To eliminate influence due to re-evaporation of an adhered substance and to measure molecular beam intensity accurately by providing a heating means at a part where heat from the filament of an ionization vacuum meter directly arrives and then re-evaporating the substance which is adhered to that part in advance.

CONSTITUTION: A heater 11 is installed in a wall part 22 of an enclosure 2 where an ionization vacuum meter 3 is laid out inside. It is desirable to use a non-induction coil for the heater 16 so that another measurement may not be affected. Molecular beams coming from a cell pass through an opening 21 of the enclosure 2 and then reaches the vacuum meter 3. However, since the molecular beams have a certain degree of spread, a thin film (substance) is adhered also to each part of the enclosure 2 and an adjacent manipulator 6. The heater 16 heats a part at which the heat of a filament 31 of the vacuum meter 3 directly arrives, namely the surface of the enclosure 2 or the adjacent manipulator 6 to reevaporate the thin film, thus eliminating the influence for the indication value of the vacuum meter 3.


Inventors:
KARASAWA TAKESHI
MITSUYU TSUNEO
Application Number:
JP13739593A
Publication Date:
December 22, 1994
Filing Date:
June 08, 1993
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
C30B23/08; G01L21/30; G01T1/16; G01T7/00; H01L21/203; (IPC1-7): G01T1/16; C30B23/08; G01L21/30; G01T7/00; H01L21/203
Attorney, Agent or Firm:
Hiroyuki Ikeuchi (1 person outside)