Title:
分子ポンプの制御装置、及び分子ポンプ装置
Document Type and Number:
Japanese Patent JP4127758
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a control device of a molecular pump for reducing electric noise and vibration without stopping the molecular pump. SOLUTION: After the rotor of the molecular pump is driven, the current to a motor winding is cut to freely run the motor. Since the electromagnet of the motor is not magnetized, the electric noise generated from the electromagnet is reduced. Since the magnetic field acting between the electromagnet and a rotor shaft in the motor is minimized because of non-magnetization of the electromagnet, the mechanical noise generated in the motor part is also reduced. Further, since the molecular pump continues evacuation during the free run of the rotor, the reduction in degree of vacuum in a vacuum chamber is also reduced.
Inventors:
Akira Yamanouchi
Namiki
Manabu Nonaka
Namiki
Manabu Nonaka
Application Number:
JP2001309561A
Publication Date:
July 30, 2008
Filing Date:
October 05, 2001
Export Citation:
Assignee:
Edwards Co., Ltd.
International Classes:
F04D19/04; F04D27/00; F04B49/02; F04B49/06; F04D29/00; F04D29/04; F04D29/046; F04D29/05; F04D29/056; F04D29/058; F16C32/04; H02P6/06; H02P6/08; H02P6/17; H02P6/20; H02P6/24
Domestic Patent References:
| JP11318096A | ||||
| JP60190696A | ||||
| JP11159530A | ||||
| JP4160223A | ||||
| JP9068190A | ||||
| JP2001251829A | ||||
| JP4282020A | ||||
| JP4004314U | ||||
| JP2107816A | ||||
| JP11022729A | ||||
| JP6074235A |
Foreign References:
| WO2000031595A1 |
Attorney, Agent or Firm:
Hitoshi Nakano
Takashi Kawai
Takashi Kawai
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