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Title:
MOLECULAR TURBOPUMP
Document Type and Number:
Japanese Patent JPS63255597
Kind Code:
A
Abstract:

PURPOSE: To improve the lubricity by arranging a radial bearing part in the intermediate part of the motor shaft for a rotary body and installing a thrust bearing consisting of a thrust receiving plate and a supporting member, onto the motor shaft edge part.

CONSTITUTION: A radial bearing part consisting of a sleeve 16 having a herringbone groove 61 on the outer peripheral surface and an supporting part 17 is formed in the intermediate part of a motor shaft 5. Further, a thrust bearing for supporting the dead weight of a rotary body consists of a thrust receiving plate 7 and a supporting member 8. Therefore, the generation of decomposition gas of the lubricating oil which is generated in case of the prior ball bearing can be suppressed, and the heat generation phenomenon can be suppressed, and the deterioration of the lubricant can be prevented.


Inventors:
MIZOBUCHI SHOTARO
HARADA HIDEOMI
OSADA NORIYUKI
KANAMORI TOSHIYA
Application Number:
JP8873687A
Publication Date:
October 21, 1988
Filing Date:
April 13, 1987
Export Citation:
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Assignee:
EBARA CORP
International Classes:
F04D19/04; (IPC1-7): F04D19/04
Attorney, Agent or Firm:
Yakushi Minoru



 
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